MEMSjet Drop Ejector
Xerox has developed a MEMS (Micro ElectroMechanical System) based drop ejector, known as MEMSJet. MEMSJet is a high-speed, precise fluid delivery mechanism that enables the delivery of extremely small drop sizes in a reliable manner. Xerox is actively offering MEMSJet for applications ranging from drug delivery to chemical deposition and analysis.
Technology DescriptionMEMSJet, a MEMS-based liquid ejection system, consists of a silicon diaphragm, a counter electrode, and a nozzle plate built over the diaphragm structure. The space between the nozzle plate and the diaphragm is filled with fluid that is supplied by a reservoir. Initially, the diaphragm is in the horizontal (undeflected) position. When a bias voltage is applied between the diaphragm and the counter electrode, the diaphragm deflects. A bias voltage pulls down the diaphragm. As the diaphragm deflects, the volume in the chamber increases, drawing in more fluid. When the bias voltage is removed, the relaxation of the diaphragm pressurizes the fluid. This causes a liquid drop to be formed and ejected out of the nozzle aperture.
BenefitsThe Xerox MEMSJet technology, together with your industry-specific skill and market knowledge, enables the design of highly accurate, scalable devices to control and move minute amounts of fluids.
ApplicationsXerox is licensing patents and know-how to companies engaged in the development, design, manufacturing, and sale of BioMEMS for the following applications:
Intellectual Property SummaryKnow-How and Skills
Xerox developed MEMS technologies to support our thermal ink jet (TIJ) product lines. The manufacture of the MEMS components for these products required the development of new technologies enabling the production of exceptionally precise channels and other structures on silicon using standard semiconductor etching processes. Orientation dependent etching technology is one of the most precise fabrication processes available for building accurate structures on the surface of a silicon chip. This process, together with precision dicing, chip placement and metrology can produce macroscopic structures 20cm or more across while maintaining micron-level tolerances. In addition, our surface coating technologies make it possible to manipulate and transport a wide variety of fluids without effecting the adjacent electronic circuitry. Finally, our matrix addressing technology enables the fabrication of these structures with a minimum of interconnects, ultimately producing a more reliable and less-expensive component.
Xerox possesses core competencies in the following MEMS-related activities:
Xerox has a substantial patent portfolio including patent applications related to the MEMSJet Liquid Ejection System.
Xerox also has impressive and effective MEMS technology in the following areas:
For your convenience and review, we have provided a sample of selected patents from our portfolio.
For Licensing InformationTo learn more about licensing the MEMSjet Drop Ejector technology.