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|  | PAE Polymers
Xerox Poly(Arylene Ether) and Poly (Arylene Ether Ketone) polymers are new advanced materials invented by Xerox researchers and developed and scaled-up at Xerox Research Centre of Canada. This exciting new technology, which has many potential
applications, is now available for licensing by chemical and polymer manufacturers.
Technology Description |
Poly(arylene ether)s (PAE) photoresist materials are based upon high performance polymers with photo- and thermo-sensitive groups that enable them to be patterned into highly defined three-dimensional surface structures. These photoresists are resistant to harsh chemical and thermal environments. They have unique mechanical and physical properties relative to other currently available photoresist materials.
PAE Polymer Structure |
Xerox has developed not only the synthetic chemical processes to make PAE photoresist but also the necessary methods to formulate and form Micro Electro Mechanical System (MEMS) devices with it. While this material was developed for use in proprietary inkjet print heads its potential applications are much broader. In fact Xerox can customize PAE polymers for mechanical properties, solvent resistance or surface properties relative to specific application contexts.
Comparision of Polymer Profiles |
The photos below show ink jet nozzles structures made with competing polymers. Polyimide is on the left vs. PAE on the right. Maximum aspect ratio for the polyimide is 2:1 and the maximum aspect ratio for the PAE is 3:1. Z direction shrinkage for the polyimide is 55% and z direction shrinkage for the PAE is 12%. Note that PAE is able to produce finer (smaller diameter) nozzles with significantly less shrinkage.
Xerox High Performance PAE Polymers provide: |
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Thermal stability |
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Hydrolytic stability |
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Solvent resistance |
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Low shrinkage during curing |
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Adhesion |
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Chemical stability/resistance |
Intellectual Property Summary |
For your convenience and review, we have provided a sample of selected patents from our portfolio.
U.S. 6,187,512 |
Process for halomethylation of high performance polymers |
U.S. 6,184,263 |
Blends containing photosensitive high performance aromatic ether curable polymers |
U.S. 6,174,636 |
Imaging members containing arylene ether alcohol polymers |
U.S. 6,139,920 |
Photoresist compositions |
U.S. 6,124,372 |
High performance polymer compositions having photosensitivity-imparting substituents and thermal sensitivity-imparting substituents |
U.S. 6,117,967 |
Arylene ether alcohol polymers |
U.S. 6,090,453 |
Halomethylated high performance curable polymers |
U.S. 6,087,414 |
Process for direct substitution of high performance polymers with unsaturated ester groups |
U.S. 6,020,119 |
Process for halomethylation of high performance polymers |
U.S. 6,007,877 |
Aqueous developable high performance photosensitive curable aromatic ether polymers |
U.S. 5,994,425 |
Curable compositions containing photosensitive high performance aromatic ether polymers |
U.S. 5,958,995 |
Blends containing photosensitive high performance aromatic ether curable polymers |
U.S. 5,945,253 |
High performance curable polymers and processes for the preparation thereof |
U.S. 5,907,001 |
Process for the preparation of photopatternable polymers |
U.S. 5,889,077 |
Process for direct substitution of high performance polymers with unsaturated ester groups |
U.S. 5,882,814 |
Imaging members containing high performance charge transporting polymers |
U.S. 5,874,192 |
Imaging members with charge transport layers containing high performance polymer blends |
U.S. 5,863,963 |
Halomethylated high performance curable polymers |
U.S. 5,849,809 |
Hydroxyalkylated high performance curable polymers |
U.S. 5,814,426 |
Imaging members containing high performance polymers |
U.S. 5,761,809 |
Process for substituting haloalkylated polymers with unsaturated ester, ether, and alkylcarboxymethylene groups |
U.S. 5,753,783 |
Process for haloalkylation of high performance polymers |
U.S. 5,739,254 |
Process for haloalkylation of high performance polymers |
U.S. 5,731,078 |
Developing apparatus and coated developer roller |
For Licensing Information |
To learn more about licensing the PAE Polymers technology, contact Xerox.
Read more about the PAE Polymers technology in this manuscript (115Kb).
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